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Our products heat the core competencies in pressure measurement and control, flow geasurement and control, gas and vapor delivery and analysis in high-vacuum laser photonics manufacturing solutions.<\/p>\n
Thermal Circuits’ heaters facilitate instruments, sub-systems and process control devices that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes and to improve process performance and productivity for our customers.<\/p>\n
Cutting edge science and engineering are the building blocks. Thermal Circuits helps our customers succeed by being an empathetic listener and collaborative partner to solve the hardest technology challenges, together.<\/p>\n
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Semiconductor Heater Applications:\u00a0<\/span><\/strong><\/h5>\n\n- \n
Heated chuck & chamber<\/h5>\n<\/li>\n
- \n
Pressure measurement<\/h5>\n<\/li>\n
- \n
High vacuum<\/h5>\n<\/li>\n
- \n
Vapor Deposition<\/h5>\n<\/li>\n
- \n
Quartz In-line<\/h5>\n<\/li>\n
- \n
Quartz bath<\/h5>\n<\/li>\n
- \n
Recirculating tanks<\/h5>\n<\/li>\n
- \n
Flow control<\/h5>\n<\/li>\n<\/ul>\n
[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”3.21.1″ custom_padding=”27px|0px|0|0px|false|false” global_module=”1382″][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_divider _builder_version=”3.21.1″][\/et_pb_divider][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”3.25″ column_structure=”1_3,1_3,1_3″][et_pb_column type=”1_3″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.2.2″ hover_enabled=”0″ global_module=”1947″ saved_tabs=”all”]<\/p>\n
![\"\"](\"http:\/\/www.thermalcircuits.com\/~thermap3\/wp-content\/uploads\/2019\/08\/IMG_5634.png\")
<\/a><\/p>\n800\u00baC HTB In-Line Semiconductor and Wafer Processing\u00a0<\/span><\/strong><\/h4>\nQuartz Etchant Tank Heater<\/span><\/span><\/strong><\/h6>\nPreformed on quartz tube using high temperature binder (HTB).<\/span><\/p>\n[\/et_pb_text][et_pb_divider _builder_version=”3.21.1″ global_module=”1751″ saved_tabs=”all”]<\/p>\n
We Maintain Benchmark Workplace Conditions and Minimize Environmental Impact<\/strong><\/h4>\n[\/et_pb_divider][et_pb_text _builder_version=”4.2.2″ header_font=”||||||||” header_3_font=”||||||||” header_3_line_height=”1.2em” header_4_font=”|700|||||||” header_4_line_height=”1.2em” hover_enabled=”0″]<\/p>\n
Thermal Circuits introduced HTB etched foil element heaters to the Semiconductor industry<\/strong><\/h4>\nHTB is Thermal Circuits’ proprietary High Tempurature Binder. This organic and inorganic coating is impregnated into materials such as fiberglass and quartz cloth, fiberglass matt and mica to facilitate compatibility of the etched foil element in applications up tto 1500\u00baF. The HTB’s coatings protect and provide macroscopic immobilization of the heating element and microscopic thermal expansion and contraction at watt densities many times greater than competitive products. The use of quartz in the etched foil heater allows for . direct mount without insulation and is preferred by designers forf high-wattage and high-temperature applications.<\/p>\n
Wafer Processing<\/h4>\n
Although application similarities exist in the etched foil heating technology employed in Chuck Technology Integrated Circuitry, there are enough variables in wattage, temperature, and mounting methods to require designers to pay special attention to combining alternative insulations and films in order to insure the success of the end product. For example, this heater\/heat sink assembly consists of an etched foil element encapsulated in a combination laminate of two thin film insulators: one Kapton\u00ae polyimide, the other Teflon\u00ae. The heater mounts to an anodized heat sink and a sensor is located in the center pedestal. Multi-heater\/heat sink assemblies incorporate into multi-port boards designed to rapidly load\/unload for “burning in” of silicone discs used in the computer industry.<\/p>\n
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![\"\"](\"http:\/\/www.thermalcircuits.com\/~thermap3\/wp-content\/uploads\/2019\/04\/IMG_5635.png\")
<\/a><\/p>\nSilicon Wafer Chuck Heater<\/span><\/strong><\/h4>\nConductive Heater Assembly with Teflon\u00ae Insulation<\/span> <\/span><\/strong><\/h6>\n Bonded to machined metal, with pressure sensitive adhesive PSA, RTD temperature sensor, thermal fuse, and wire harness with electrical connector. <\/span><\/p>\n[\/et_pb_text][et_pb_text _builder_version=”4.2.2″ max_width=”100%” hover_enabled=”0″ global_module=”1729″ saved_tabs=”all”]<\/p>\n
![\"\"](\"http:\/\/www.thermalcircuits.com\/~thermap3\/wp-content\/uploads\/2019\/08\/IMG_5641.png\")
<\/a><\/p>\n220\u00ba High Temperature, Conductive Heater Assembly with Kapton\u00ae Polyimide Insulation<\/span> <\/span><\/strong><\/h4>\nHeater for Electronic Enclosure Valve Heaters<\/span><\/strong><\/h6>\n Conductive heater assembly with Kapton\u00ae Polyimide dielectric insulation. Bonded to machined metalwork with thermistor, wire harness and connector.<\/span><\/p>\n[\/et_pb_text][\/et_pb_column][et_pb_column type=”1_3″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.2.2″ header_font=”||||||||” header_4_font=”||||||||” max_width=”100%” hover_enabled=”0″ global_module=”1945″ saved_tabs=”all”]<\/p>\n
Heated chuck & chamber<\/h5>\n<\/li>\n
Pressure measurement<\/h5>\n<\/li>\n
High vacuum<\/h5>\n<\/li>\n
Vapor Deposition<\/h5>\n<\/li>\n
Quartz In-line<\/h5>\n<\/li>\n
Quartz bath<\/h5>\n<\/li>\n
Recirculating tanks<\/h5>\n<\/li>\n
Flow control<\/h5>\n<\/li>\n<\/ul>\n
[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”3.21.1″ custom_padding=”27px|0px|0|0px|false|false” global_module=”1382″][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_divider _builder_version=”3.21.1″][\/et_pb_divider][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”3.25″ column_structure=”1_3,1_3,1_3″][et_pb_column type=”1_3″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.2.2″ hover_enabled=”0″ global_module=”1947″ saved_tabs=”all”]<\/p>\n
Preformed on quartz tube using high temperature binder (HTB).<\/span><\/p>\n [\/et_pb_text][et_pb_divider _builder_version=”3.21.1″ global_module=”1751″ saved_tabs=”all”]<\/p>\n [\/et_pb_divider][et_pb_text _builder_version=”4.2.2″ header_font=”||||||||” header_3_font=”||||||||” header_3_line_height=”1.2em” header_4_font=”|700|||||||” header_4_line_height=”1.2em” hover_enabled=”0″]<\/p>\n HTB is Thermal Circuits’ proprietary High Tempurature Binder. This organic and inorganic coating is impregnated into materials such as fiberglass and quartz cloth, fiberglass matt and mica to facilitate compatibility of the etched foil element in applications up tto 1500\u00baF. The HTB’s coatings protect and provide macroscopic immobilization of the heating element and microscopic thermal expansion and contraction at watt densities many times greater than competitive products. The use of quartz in the etched foil heater allows for . direct mount without insulation and is preferred by designers forf high-wattage and high-temperature applications.<\/p>\n Although application similarities exist in the etched foil heating technology employed in Chuck Technology Integrated Circuitry, there are enough variables in wattage, temperature, and mounting methods to require designers to pay special attention to combining alternative insulations and films in order to insure the success of the end product. For example, this heater\/heat sink assembly consists of an etched foil element encapsulated in a combination laminate of two thin film insulators: one Kapton\u00ae polyimide, the other Teflon\u00ae. The heater mounts to an anodized heat sink and a sensor is located in the center pedestal. Multi-heater\/heat sink assemblies incorporate into multi-port boards designed to rapidly load\/unload for “burning in” of silicone discs used in the computer industry.<\/p>\n [\/et_pb_text][\/et_pb_column][et_pb_column type=”1_3″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.2.2″ max_width=”100%” hover_enabled=”0″ global_module=”1943″ saved_tabs=”all”]<\/p>\n Bonded to machined metal, with pressure sensitive adhesive PSA, RTD temperature sensor, thermal fuse, and wire harness with electrical connector. <\/span><\/p>\n [\/et_pb_text][et_pb_text _builder_version=”4.2.2″ max_width=”100%” hover_enabled=”0″ global_module=”1729″ saved_tabs=”all”]<\/p>\n Conductive heater assembly with Kapton\u00ae Polyimide dielectric insulation. Bonded to machined metalwork with thermistor, wire harness and connector.<\/span><\/p>\n [\/et_pb_text][\/et_pb_column][et_pb_column type=”1_3″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.2.2″ header_font=”||||||||” header_4_font=”||||||||” max_width=”100%” hover_enabled=”0″ global_module=”1945″ saved_tabs=”all”]<\/p>\n<\/a><\/p>\n800\u00baC HTB In-Line Semiconductor and Wafer Processing\u00a0<\/span><\/strong><\/h4>\n
Quartz Etchant Tank Heater<\/span><\/span><\/strong><\/h6>\n
We Maintain Benchmark Workplace Conditions and Minimize Environmental Impact<\/strong><\/h4>\n
Thermal Circuits introduced HTB etched foil element heaters to the Semiconductor industry<\/strong><\/h4>\n
Wafer Processing<\/h4>\n
<\/a><\/p>\nSilicon Wafer Chuck Heater<\/span><\/strong><\/h4>\n
Conductive Heater Assembly with Teflon\u00ae Insulation<\/span> <\/span><\/strong><\/h6>\n
<\/a><\/p>\n220\u00ba High Temperature, Conductive Heater Assembly with Kapton\u00ae Polyimide Insulation<\/span> <\/span><\/strong><\/h4>\n
Heater for Electronic Enclosure Valve Heaters<\/span><\/strong><\/h6>\n